The processing errors of precision manufacturing have entered the nanometer and sub-nanometer scale from the micron scale in the past. Therefore, the demand for precision measuring instruments in advanced manufacturing industries is becoming more and more extensive, and at the same time, the error requirements are also getting higher and higher. In modern high-end manufacturing, industries in urgent need of nanoscale precision measurement include display panels, semiconductor chips, high-end machine tools, photolithography machines, and LED industries. The downstream fields of display technology include smartphones, tablets, laptops, TVs, monitors, etc., and may play an important role in emerging fields such as automotive electronics, industrial control, electronic labels, and smart medical care in the future. Therefore, the explosion of MiniLED, MicroLED, and OLED industries has provided huge opportunities for China's panel manufacturing industry. However, the process control of the OLED manufacturing process is complex, and a large-range nanoscale measurement system is urgently needed to control the production process online.  

This technology is mainly oriented to large-scale precision measurement (single dimension is greater than 1 meter). It has won the third prize in the National Innovation and Entrepreneurship Competition - Advanced Manufacturing Industry. The existing results are shown in Figure 3.1.

This technology is mainly used in the display panel industry and large scientific research platforms. This system can be directly applied to the critical dimensions and device surface roughness measurement of the OLED front-end (resolution: 1nm). The scientific research category is mainly oriented to the research of large grating rulers and other fields. At the same time, the system can be expanded and combined with white light interferometer and other systems to achieve high-speed and high-precision measurement.