Precision measurement based on optics is widely used in advanced manufacturing, including optical critical dimension (Critical Dimension) measurement (submicron accuracy) and TP measurement (Total Pitch) in display panels. The accuracy requirements for dimensional measurement of advanced molds are all on the micron scale. At present, the display panel industry mostly uses imported optical measurement equipment, and the precision processing industry mostly uses three-dimensional coordinate measuring instruments to achieve high-precision measurement. Its accuracy and application scenarios are limited (three-dimensional coordinates are inefficient and cannot be applied to flexible scenarios). The project focuses on optical measurement, combining vision algorithms with precision motion to achieve high-precision visual critical dimension measurement at the micron scale.
This technology is mainly targeted at display panels, machine parts, precision components, high-end mold manufacturing and other fields. Its system structure is shown in Figure 3.2.
At present, this technology is expected to realize a high-precision 2D visual online dimensional measurement system with a measurement range of 1m, a detection accuracy of 5um, and a repeatability accuracy of 1um. It can partially replace the traditional three-coordinate measuring instrument to achieve optical precision measurement.
The system is currently still in the research and development stage. The preliminary structural design has been completed, and the visual splicing algorithm, autofocus system, self-balancing system, and temperature compensation system have been completed. The patent applications that have been completed include 1 Chinese invention patent, 1 PCT, 1 US patent, and 2 patents being applied for.
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