High-end magnetic sensor chips are widely used in automobiles, heavy machinery and other fields. Magnetic sensor chips are widely used in automobiles to ensure safer driving, cleaner emissions, and higher driving comfort. These three indicators are essential elements for today's automobiles. 

According to statistics, a car requires 40 to 100 magnetic sensor chips. The domestic magnetic sensor chip market was 4.3 billion yuan in 2016 and will reach 9.5 billion yuan in 2022. The related magnetic sensor modules amounted to 60.3 billion yuan and 120 billion yuan respectively.

1) Preliminary research foundation and results Professor Zhang Wenwei has 15 years of experience in the development and management of magnetic sensor SOC chips. He has mastered core technologies in magnetic sensor chips for automobiles and industries, and has expertise in device physics, device materials, and hybrid integrated circuit design and optimization. Has many years of experience. He has 10 invention patents authorized by the United States and 7 patents authorized by China, and has published more than 30 academic papers in domestic and foreign journals. While serving as a global R&D manager for a Fortune 500 company in the UK and a German automotive chip company, he presided over the development of a series of automotive magnetic sensor SoC chips and modules for automotive throttle, throttle, current sensors; and programmable 3D angle sensors. Development of chips for EGR, turbocharging, and vehicle height sensors.

2) Research plan and expected results: It is planned to develop an automotive-grade CMOS-compatible monolithic integrated 3D Hall magnetic sensor chip, which can integrate 2D vertical Hall devices, 1D horizontal Hall devices, offset and noise on the same substrate material Eliminating circuits, amplification and interface circuits, signal processing circuits, etc. to realize the detection of three-dimensional magnetic fields in space can greatly reduce the manufacturing cost, volume and power consumption of 3D Hall sensors, and improve the reliability of 3D Hall sensors. In response to the automotive industry's requirements for high integration, high reliability, high consistency, and strong electromagnetic compatibility of magnetic sensor chips, this project plans to develop high-voltage resistant and high-performance automotive magnetic sensor chips. The product is based on high-performance analog-digital hybrid IC magnetic sensors. Sensor chips integrate magnetic sensitive components and subsequent processing circuits into a single silicon-based SOC solution to meet the requirements of the automotive industry.

 The main research contents include:

 1. Research on preparation of 3D Hall sensor devices

 2. Research on CMOS monolithic integrated 3D Hall sensor SoC chip