Semiconductor Integrated Circuits and Precision Instrument Equipment

Research Related to Laser Processing Process Control

The specific process and processing effect of laser processing are closely related to the interaction process between laser and material, which directly affects the processing effect and whether the device meets the usage standards. The results obtained from the application research of laser processing technology are shown in Figure 7.1 and Figure 7.2.

 

  

At present, we have mastered the technical means to prepare multi-scale devices using laser direct writing technology, including ultra-fine-grained thin film preparation methods, laser beam super-diffraction nanoprocessing direct writing technology, and commonly used characterization technologies such as SEM, TEM, XRD, RAMAN and other detection technologies. In addition, a variety of key technologies and new laser micro-nano preparation technologies have been developed based on the material selection in maskless nanolithography technology and the influencing factors and control mechanisms of various physical effects and processing parameters on nanostructure processing in super-diffraction nanolithography. Methods, the principles and processes of photophysics of the interaction between light and matter at the nanoscale have also been studied in depth. It is expected that breakthroughs can be made in the exploration and improvement of specific processes for laser applications.