The use of monocrystalline silicon material piezoresistive effect and integrated circuit technology made of sensors. Monocrystalline silicon material in the force, the resistivity changes, through the measurement circuit can be obtained proportional to the force changes in the electrical signal output, when the force is applied to the silicon crystal, the crystal lattice deformation, so that the carriers from one energy valley to the other energy valley scattering, causing changes in the mobility of the carriers, the carrier perturbation of the longitudinal and transverse average amount of the carriers, so that the resistivity of the silicon changes, four piezoresistive The four piezoresistors are connected to a Wheatstone bridge to provide an electrical output proportional to the measured voltage.

MEMS-based pressure sensor chips are used in medical devices, pumps and compressors, air conditioning and ventilation systems, and hydraulic and pneumatic equipment.

The main research direction of this project focuses on the development of sensitive components, mainly focusing on:

A.Research on the manufacturing process flow of diffused silicon type MEMS pressure sensor, combined with finite element analysis to simulate the sensitivity of the sensor's die.

B.Packaging of the pressure sensor. The selection of encapsulation material and the design of structure were optimized by combining finite element analysis and experiment.