The specific process and processing effect of laser processing are closely related to the interaction process between laser and material, which directly affects the processing effect and whether the device meets the usage standards. 

1) Preliminary research basis and results 

 (1) The composition analysis process of micro-nano structures processed by laser a. Original picture b. Picture of the grayscale mask produced by laser processing under the microscope ch Analysis of the composition ratio of each laser processing point 

(2) Three-dimensional structures produced by laser processing combined with other processes.

2)Research plan and expected results 

He has long been committed to research on the application of laser processing technology. He has now mastered the technical means of preparing multi-scale devices using laser direct writing technology, including ultra-fine grain film preparation methods, laser beam super-diffraction nanoprocessing direct writing technology, and commonly used characterization technologies. SEM, TEM, XRD, RAMAN and other detection technologies. In addition, a variety of key technologies and new laser micro-nano preparation technologies have been developed based on the material selection in maskless nanolithography technology and the influencing factors and control mechanisms of various physical effects and processing parameters on nanostructure processing in super-diffraction nanolithography. Methods, the principles and processes of photophysics of the interaction between light and matter at the nanoscale have also been studied in depth. It is expected that breakthroughs can be made in the exploration and improvement of specific processes for laser applications.